Page "Moore's law" Paragraph 34

Numerous innovations by a large number of scientists and engineers have been significant factors in the sustenance of Moore ’ s law since the beginning of the integrated circuit ( IC ) era.

Whereas a detailed list of such significant contributions would certainly be desirable, below just a few innovations are listed as examples of breakthroughs that have played a critical role in the advancement of integrated circuit technology by more than six orders of magnitude in less than five decades: