However, with the semiconductor industry ’ s need for both higher resolution ( to produce denser and faster chips ) and higher throughput ( for lower costs ), the lamp-based lithography tools were no longer able to meet the industry ’ s requirements.

However, with the semiconductor industry ’ s need for both finer resolution ( for denser and faster chips ) and higher production throughput ( for lower costs ), the lamp-based lithography tools were no longer able to meet the industry ’ s requirements.

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