Process monitoring capabilities in continuous-flow systems can be achieved with highly sensitive microfluidic flow sensors based on MEMS technology which offer resolutions down to the nanoliter range.

Diamondoid structures and other stiff covalent structures, if achieved, would have a wide range of possible applications, going far beyond current MEMS technology.

Microelectromechanical systems ( MEMS ) ( also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems ) is the technology of very small devices ; it merges at the nano-scale into nanoelectromechanical systems ( NEMS ) and nanotechnology.

MEMS are also referred to as micromachines ( in Japan ), or micro systems technology – MST ( in Europe ).

The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i. e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.

After preparing a large number of MEMS devices on a silicon wafer, individual dies have to be separated, which is called die preparation in semiconductor technology.

Surface micromachining was created in the late 1980s to render micromachining of silicon more compatible with planar integrated circuit technology, with the goal of combining MEMS and integrated circuits on the same silicon wafer.

In addition, both large and small companies work in R & D to explore MEMS technology.

* Millipede memory, a MEMS technology for non-volatile data storage of more than a terabit per square inch

An important emerging class of optical crossbars is being implemented with MEMS technology.

Technological progress allows more and more sensors to be manufactured on a microscopic scale as microsensors using MEMS technology.

Draper's expertise includes the areas of guidance, navigation, and control technologies and systems ; fault-tolerant computing ; advanced algorithms and software solutions ; modeling and simulation ; and MEMS and multichip module technology.

In the 1990s, Motorola ’ s technology was the driving force behind intelligent power switches for anti-lock brake systems, one of the first microelectromechanical systems ( MEMS ) inertial sensor for automotive airbags, and Motorola ’ s MPC5200 microprocessor deployed telematic systems for General Motors ’ OnStar systems.

* MEMS Movie Gallery, spider mite used for demonstrating microelectromechanical systems technology

Its application areas include control of electric drives for industrial applications and household appliances, modules for renewable energy production, conversion and transmission, semiconductor components for lighting management systems and LED lighting, power supplies for servers, PCs, notebooks and consumer electronics, custom devices for peripheral devices, game consoles, applications in medical technology, high-frequency components having a protective function for communication and tuner systems and silicon MEMS microphones.

In August 2004, Nanochip licensed PRAM technology for use in MEMS ( micro-electric-mechanical-systems ) probe storage devices.

* August 2004: Nanochip licenses PRAM technology from Ovonyx for use in MEMS probe storage

Because of the scale on which they can function, NEMS are expected to significantly impact many areas of technology and science and eventually replace MEMS.

Inexpensive ( as of 2010, approximately US $ 5 per part in quantity ) vibrating structure gyroscopes manufactured with MEMS technology have become widely available.

Recent designs have been based on microelectromechanical systems ( MEMS ) technology which generates an electrical response to ground motion through an active feedback circuit to maintain the position of a small piece of silicon.

Devices such as the LG Electronics Magic Wand, the Loop and the Scoop use Hillcrest Labs ' Freespace technology, which uses MEMS accelerometers, gyroscopes and other sensors to translate gestures into cursor movement.

Energy can also be harvested to power small autonomous sensors such as those developed using MEMS technology.

* IBM Millipede, a MEMS technology for non-volatile data storage

This MEMS paradigm has enabled the manufacturing of low cost accelerometers for e. g. automotive air-bag systems and other applications where low performance and / or high g-ranges are sufficient.

The Microelectromechanical systems ( MEMS ) Rotary Engine Lab at the University of California, Berkeley has been developing Wankel engines of down to 1 mm in diameter with displacements less than 0. 1 cc.

Cahners In-Stat Group has projected sales of MEMS to reach $ 12B by 2005.

STMicroelectronics has been involved in developing MicroElectroMechanical Systems ( MEMS ) since 2001.

Technological progress has allowed the manufacture of thermal mass flow meters on a microscopic scale as MEMS sensors ; these flow devices can be used to measure flow rates in the range of nanolitres or microlitres per minute.

The Military Emergency Management Specialist ( MEMS ) qualification created by the State Guard Association of the United States has become a common training focal point among state defense forces.

The MEMS Lab in the TKU has been developing MAVs for several years, and since 2007 the Space and Flight Dynamics ( SFD ) Lab has joined the research team for the development of autonomous flight of MAVs.

Honeywell Aerospace has produced inertial measurement units based on MEMS and microelectronics technologies that it claims can survive the shock of being fired out of a gun.

Semefab, the former General Instrument semiconductor foundry, has been funded as the UK's Primary Centre for the development of microelectromechanical systems ( MEMS ) and nanotechnology.

The use of microelectromechanical systems ( MEMS ) in optical applications, which is known as optical MEMS or micro-opto-electro-mechanical structures ( MOEMS ), has enabled the possibility to combine the mechanical, electrical and optical components in very small scale.

The basic idea is to reduce the amount of wiring needed on-chip ; instead of wiring every cell, the cells are placed closer together and read by current passing through the MEMS probes, acting like wires.

The nitrides of silicon, aluminium and titanium as well as silicon carbide and other ceramics are increasingly applied in MEMS fabrication due to advantageous combinations of material properties.

Consequently, it is potentially useful for a broad range of scientific, industrial, and biomedical applications that require high image acquisition rates, including real-time diagnosis and evaluation of shockwaves, microfluidics, MEMS, and laser surgery.

MEMS are made up of components between 1 to 100 micrometres in size ( i. e. 0. 001 to 0. 1 mm ), and MEMS devices generally range in size from 20 micrometres ( 20 millionths of a metre ) to a millimetre ( i. e. 0. 02 to 1. 0 mm ).

The economies of scale, ready availability of cheap high-quality materials and ability to incorporate electronic functionality make silicon attractive for a wide variety of MEMS applications.

MEMS devices can be made from polymers by processes such as injection molding, embossing or stereolithography and are especially well suited to microfluidic applications such as disposable blood testing cartridges.

In another view point MEMS applications are categorized by the field of application ( commercial applications include ):

* MEMS gyroscopes used in modern cars and other applications to detect yaw ; e. g., to deploy a roll over bar or trigger dynamic stability control

While MEMS manufacturing continues to be dominated by used semiconductor equipment, there is a migration to 200 mm lines and select new tools, including etch and bonding for certain MEMS applications.

MEMS have already had a profound impact on certain applications such as automotive sensors and inkjet printers.

One of the most widely used applications for the Knudsen number is in microfluidics and MEMS device design.

Such fluids may find applications in microfluidic devices and microelectromechanical systems ( MEMS ).

Analog Devices micro-electromechanical systems ( MEMS ) and sensors address system performance parameters, such as safety, reliability, and highly precise measurements and diagnostics, in healthcare and industrial applications.

Analog Devices MEMS microphones are found in smart phones, tablet PCs, security systems, and medical applications.

MEMS have a much higher noise level ( 50 dB velocity higher ) than geophones and can only be used in strong motion or active seismic applications.